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Series |
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VUV |
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Specifications |
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all metal UHV angle valve - copper sealed housing and valve seat - for use ![]()
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Actuation |
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manual with hexagon key or allen screw |
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Connection |
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CF flanges - rotatable |
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Pressure range |
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1.0E-12 mbar to atmospheric pressure |
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Leak rate |
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< 1.0E-10 mbar l/s |
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Drive seal |
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hydroformed bellows |
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Housing construction |
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2-parts, drive removable |
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Housing material |
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stainless steel |
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Bellows material |
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stainless steel |
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Housing seal material |
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copper |
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Seal valve plate material |
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replaceable copper gasket |
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Bakeout temperature opened |
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to 400 °C |
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Bakeout temperature closed |
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to 250 °C |
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Mounting position |
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arbitrary |
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Visual position indicator |
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position hexagon bolt |
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Remark |
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gasket exchange through lateral flange |
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Connection |
H |
L |
SL |
DN16CF-R |
122 |
38 |
38 |
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